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What is LCOS-SLM?
Differences from other light control methods
LCOS-SLM controls light by controlling the phase of light. In industrial applications, different methods other than LCOS-SLM are also used for controlling light.
| Simultaneous multipoint /Scan | Change in beam shape | Aberration correction | Pattern switching | Processing area | |
|---|---|---|---|---|---|
| LCOS-SLM | Simultaneous multipoint |
Yes |
Yes |
Yes |
Microscopic area |
| Galvanometer scanner | Scan |
No |
No |
Yes |
Wide area |
| DOE (Diffractive optical element) | Simultaneous multipoint |
Yes |
Yes |
No (fixed) |
Microscopic area |
| MEMS mirror | Scan |
No |
No |
Yes |
Wide area |
| Lenses (Cylindrical lenses, etc.) |
Simultaneous multipoint |
Yes |
No |
No (fixed) |
Microscopic area |
The differences between a typical galvanometer scanner and LCOS-SLM are explained in detail below.
Galvanometer scanner
This method uses a galvanometer mirror that reflects light to scan a laser beam. The irradiation position of the laser beam can be physically moved in the X and Y directions by changing the direction of the mirror using a control program. This method allows flexibly changing the laser beam scanning by using the control program and is ideal for shifting the irradiation position over a wide range. The accuracy, however, is limited because the direction of the mirror is physically controlled. This method is not suitable for three-dimensional irradiation because the depth of the irradiation position is determined by the lens.
LCOS-SLM
Unlike the method for controlling the laser irradiation position by physically moving mirrors, etc., LCOS-SLM electrically changes the laser beam irradiation pattern itself. The irradiation position can be controlled in steps of a few micrometers, achieving extremely high accuracy.
The beam pattern can be changed to match the desired shape for batch irradiation, and the irradiation position can be split to multiple points. The irradiation position can also be controlled in the depth direction to simultaneously perform three-dimensional irradiation including the interior of the object.
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