LCOS-SLM features high light utilization efficiency which is expressed as the ratio of the 0th-order diffraction light intensity to the incident light intensity. This light utilization efficiency mainly depends on the diffraction loss resulting from the pixel structure and reflectivity of the mirror formed on the CMOS chip. We have minimized the diffraction loss to below 5% by leveraging our advanced CMOS technology while paying careful attention to its design. The wide wavelength band type employs an aluminum mirror and so has somewhat lower reflectivity compared to the other types using a dielectric multilayer film mirror, but can be used over a broad wavelength range.
Type No. |
Wide wavelength band type | ||
---|---|---|---|
-01 | -07 | -08 | |
Wavelength of light source (nm) | 633 | 1064 | 1550 |
Light utilization efficiency (%) | 76 | 80 | 86 |
Our LCOS-SLM provides phase modulation of more than 2π radians over the supported wavelength range. Each type is adjusted prior to shipment to ensure high-precision and highly linear modulation characteristics for a specific wavelength range. Figure 1 shows typical phase modulation characteristics. As can be seen, phase modulation of 2π radians or more is obtained with high linearity. We also confirmed that the phase modulation for 95% of the pixels in the effective area is within ±2σ, indicating only small variations.
Due to the optical design optimized to minimize light loss, our LCOS-SLM delivers high diffraction efficiency close to the theoretical values. Figure 2 shows diffraction spot images obtained when multi-level phase gratings are displayed. Using a multi-level phase grating makes it possible to concentrate the diffraction spot only at the +1st order, for example as shown in Figure 2 (c), achieving a high light utilization efficiency. Figure 3 also shows typical diffraction efficiencies. The diffraction efficiency here is the ratio of the 1st-order diffraction light intensity to the 0th-order light intensity when no modulation is performed (no pattern is displayed).
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